JPS6344989Y2 - - Google Patents

Info

Publication number
JPS6344989Y2
JPS6344989Y2 JP1981133863U JP13386381U JPS6344989Y2 JP S6344989 Y2 JPS6344989 Y2 JP S6344989Y2 JP 1981133863 U JP1981133863 U JP 1981133863U JP 13386381 U JP13386381 U JP 13386381U JP S6344989 Y2 JPS6344989 Y2 JP S6344989Y2
Authority
JP
Japan
Prior art keywords
waste liquid
cup
liquid cup
wall
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981133863U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5840275U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13386381U priority Critical patent/JPS5840275U/ja
Publication of JPS5840275U publication Critical patent/JPS5840275U/ja
Application granted granted Critical
Publication of JPS6344989Y2 publication Critical patent/JPS6344989Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP13386381U 1981-09-09 1981-09-09 塗布装置 Granted JPS5840275U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13386381U JPS5840275U (ja) 1981-09-09 1981-09-09 塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13386381U JPS5840275U (ja) 1981-09-09 1981-09-09 塗布装置

Publications (2)

Publication Number Publication Date
JPS5840275U JPS5840275U (ja) 1983-03-16
JPS6344989Y2 true JPS6344989Y2 (en]) 1988-11-22

Family

ID=29927308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13386381U Granted JPS5840275U (ja) 1981-09-09 1981-09-09 塗布装置

Country Status (1)

Country Link
JP (1) JPS5840275U (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6481223A (en) * 1987-09-22 1989-03-27 Nec Corp Coater for multi-layer film
JP5265943B2 (ja) * 2008-02-28 2013-08-14 大日本スクリーン製造株式会社 基板処理装置
JP5461236B2 (ja) * 2010-02-26 2014-04-02 株式会社高田工業所 半導体基板の処理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57197069U (en]) * 1981-06-11 1982-12-14

Also Published As

Publication number Publication date
JPS5840275U (ja) 1983-03-16

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